Study of Pd/Au metallisation and surface characteristics on Mg-doped GaN induced by low power inductively coupled plasma etching

✍ Scribed by A. Baharin; M. Kocan; U.K. Mishra; G. Parish; B.D. Nener

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 430 KB
• Volume: 32
• Category: Article
• ISSN: 0925-3467
• DOI: 10.1016/j.optmat.2009.04.014