✦ LIBER ✦
Study of oxygen depth distribution in Si1Ox and Mo1Ox films using 4He ion elastic scattering
✍ Scribed by V. Hnatowicz; H. Macholdt; F.-W. Richter
- Book ID
- 113282133
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 455 KB
- Volume
- 62
- Category
- Article
- ISSN
- 0168-583X
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