✦ LIBER ✦
Study of nanopipes formed in silicon wafers using helium implantation by SEM, RBS and SIMS methods
✍ Scribed by A. V. Frantskevich; A. M. Saad; A. V. Mazanik; N. V. Frantskevich; A. K. Fedotov; V. S. Kulinkauskas; A. A. Patryn
- Publisher
- Springer US
- Year
- 2008
- Tongue
- English
- Weight
- 246 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0957-4522
No coin nor oath required. For personal study only.