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Study of Machining Microchannels on Quartz by the Laser-Induced Plasma

✍ Scribed by Huang, Zheng; Feng, Cai Ling

Book ID
121881729
Publisher
Trans Tech Publications, Ltd.
Year
2010
Tongue
English
Weight
326 KB
Volume
154-155
Category
Article
ISSN
1662-8958

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Laser photodissociation of trimethylaluminum and trimethylindium at 248nm on a quartz substrate was studied by detecting aluminum and indium atoms appearing as reaction intermediates by laser-induced fluorescence. Photodissociation occurred predominantly in the adsorbed state in the experimental con