Study of low-energy hydrogen implantation in silicon : K. Srikanth and S. Ashok. Vacuum39(11/12), 1057 (1989)

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 127 KB
• Volume: 30
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(90)90661-6