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Study of interaction between silicon surfaces in dilute ammonia peroxide mixtures (APM) and their components using atomic force microscope (AFM)
✍ Scribed by S. Siddiqui; J. Zhang; M. Keswani; A. Fuerst; S. Raghavan
- Book ID
- 113797731
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 705 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0167-9317
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