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Study of initial dust formation in an Ar-SiH4 discharge by laser induced particle explosive evaporation

✍ Scribed by Boufendi, L.; Hermann, J.; Bouchoule, A.; Dubreuil, B.; Stoffels, E.; Stoffels, W. W.; de Giorgi, M. L.


Book ID
120285898
Publisher
American Institute of Physics
Year
1994
Tongue
English
Weight
948 KB
Volume
76
Category
Article
ISSN
0021-8979

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