Study of how the angles of incidence of the rays of actinic radiation on the surface of a photomask affect the angular errors of dials fabricated by lift-off photolithography

✍ Scribed by Kruchinin, D. Yu.

• Book ID: 115402616
• Publisher: Optical Society of America
• Year: 2010
• Tongue: English
• Weight: 84 KB
• Volume: 77
• Category: Article
• ISSN: 1070-9762
• DOI: 10.1364/JOT.77.000387