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Study of electrical and structural properties of boron doped polysilicon films with a low nitrogen content

โœ Scribed by H. Bouridah; F. Mansour; R. Mahamdi; P. Temple-Boyer

Book ID
106390237
Publisher
Springer
Year
2005
Tongue
English
Weight
363 KB
Volume
40
Category
Article
ISSN
0022-2461

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## Abstract Nanocrystalline and microcrystalline undoped and boron doped diamond films are investigated by means of SEM, Raman and photocurrent techniques. SEM measurements on nanocrystalline diamond show the typical diamond columnar structure whereas for microcrystalline diamond such structure is