✦ LIBER ✦
Study of diffusion barrier properties of ternary alloy (TixAlyNz) in Cu/TixAlyNz/SiO2/Si thin film structure
✍ Scribed by Y.K. Lee; Khin Maung Latt; Thomas Osipowicz; Cham Sher-Yi
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 149 KB
- Volume
- 3
- Category
- Article
- ISSN
- 1369-8001
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