✦ LIBER ✦
Study of a HPPMS discharge in Ar/O 2 mixture: II. Plasma optical emission and deposited RuO x film properties
✍ Scribed by Benzeggouta, D; Hugon, M C; Bretagne, J
- Book ID
- 121434513
- Publisher
- Institute of Physics
- Year
- 2009
- Tongue
- English
- Weight
- 949 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0963-0252
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