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Study by X-ray photoelectron spectroscopy and X-ray diffraction of the growth of TiN thin films obtained by nitridation of Ti layers

✍ Scribed by S. Santucci; L. Lozzi; M. Passacantando; P. Picozzi; R. Alfonsetti; R. Diamanti; G. Moccia


Book ID
114086121
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
308 KB
Volume
290-291
Category
Article
ISSN
0040-6090

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