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Study by AES of the titanium nitruration in the growing of TiN thin films by PLD technique

✍ Scribed by C. Gonzalez-Valenzuela; L. Cota; R. Gonzalez-Valenzuela; W. de la Cruz; A. Duarte-Möller

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 191 KB
Volume: 252
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2005.05.058

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