✦ LIBER ✦
Studies on sensitivity and etching resistance of calix[4]arene derivatives as negative tone electron beam resists
✍ Scribed by A. Ruderisch; H. Sailer; V. Schurig; D.P. Kern
- Book ID
- 114155524
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 288 KB
- Volume
- 67-68
- Category
- Article
- ISSN
- 0167-9317
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