✦ LIBER ✦
Studies on optical, chemical, and electrical properties of rapid SiO2 atomic layer deposition using tris(tert-butoxy)silanol and trimethyl-aluminum
✍ Scribed by Dongwon Choi; Boo-Kyung Kim; Kwun-Bum Chung; Jin-Seong Park
- Book ID
- 119322464
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 259 KB
- Volume
- 47
- Category
- Article
- ISSN
- 0025-5408
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