Studies on Diamond-like Carbon Coatings for the Application in Micro Actuators

✍ Scribed by D. Paulkowski; R. Bandorf; S. Achilles; F. Pape; H. H. Gatzen; G. Bräuer

• Publisher: John Wiley and Sons
• Year: 2008
• Tongue: English
• Weight: 316 KB
• Volume: 10
• Category: Article
• ISSN: 1438-1656
• DOI: 10.1002/adem.200800051