✦ LIBER ✦
Studies of the low-pressure inductively-coupled plasma etching for a larger area wafer using plasma modeling and Langmuir probe
✍ Scribed by Collison, Wenli Z.
- Book ID
- 127050570
- Publisher
- AVS (American Vacuum Society)
- Year
- 1998
- Tongue
- English
- Weight
- 453 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0734-2101
- DOI
- 10.1116/1.580955
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