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Studies of structure and composition of a Pt-based basic electrode for deposition of PZT ferroelectric films on silicon substrates

✍ Scribed by V. G. Beshenkov; A. G. Znamenskii; V. A. Marchenko

Book ID: 110203475
Publisher: Pleiades Publishing
Year: 2011
Tongue: English
Weight: 149 KB
Volume: 5
Category: Article
ISSN: 1027-4510
DOI: 10.1134/s1027451011100041

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