✦ LIBER ✦
Studies of metal-induced surface defects in czochralski Si following rapid thermal processing with thermal wave method
✍ Scribed by S. Hahn; W.L. Smith; H. Suga; R. Meinecke; R.R. Kola; G.A. Rozgonyi
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 1021 KB
- Volume
- 103
- Category
- Article
- ISSN
- 0022-0248
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