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Strukturuntersuchung der Legierungsphasen Cu2Te, CuTe, Cu3Sb, InTe, Bi2Se3, Pd5Sb3und Pd5Bi3

✍ Scribed by K. Schubert; K. Anderko; M. Kluge; H. Beeskow; M. Ilschner; E. Dörre; P. Esslinger


Publisher
Springer
Year
1953
Tongue
English
Weight
161 KB
Volume
40
Category
Article
ISSN
0028-1042

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Micromachined thermal inclinometer based
✍ A. Giani; F. Mailly; M. Al khalfioui; A. Foucaran; A. Boyer 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 222 KB

The techniques of micromachining are used for the manufacturing of a thermal inclinometer, which requires no solid proof mass and has a low-cost production. The sensor principle is as follows: a heating resistor creates a symmetrical temperature profile and two thermocouples, placed symmetrically on