Light-emitting silicon films fabricated
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Yukako Honda; Shigenari Shida; Kazuo Goda; Tetsuo Nagata
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Article
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2006
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Elsevier Science
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English
โ 371 KB
A neutral Si-cluster deposition apparatus has been constructed for preparing Si films whose light-emitting features are studied under various deposition and subsequent annealing conditions. After the setup and operation of the apparatus are described, examples are shown in which efficient light-emit