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Structure of amorphous silicon layers deposited under ultrahigh vacuum at different substrate temperatures

โœ Scribed by A.F. Vyatkin; L.E. Farber; A.S. Avilov; S.N. Orekhov


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
263 KB
Volume
183
Category
Article
ISSN
0040-6090

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