Fabrication of Microcantilever Sensors A
β
J.βH. Park; T.βY. Kwon; D.βS. Yoon; H. Kim; T.βS. Kim
π
Article
π
2005
π
John Wiley and Sons
π
English
β 494 KB
## Abstract The integration and the device realization of Pb(Zr,βTi)O~3~ (PZT) thick films on Si substrates are known to be extremely difficult because the processing temperature of the PZT thick film is close to the melting point of Si. However, PZT thickβfilm devices on Si warrant attention as th