Micro-and nanoelectromechanical systems (MEMS/NEMS) have a high potential for mass sensing application. By miniaturization of the dimensions, higher and higher sensitivities can be achieved. Here we are presenting finite element modelling and optimization of a free-free beam type mechanical resonato
✦ LIBER ✦
Structure design and fabrication of a novel dual-mass resonant output micromechanical gyroscope
✍ Scribed by Jianli Li; Jiancheng Fang; Haifeng Dong; Ye Tao
- Publisher
- Springer-Verlag
- Year
- 2010
- Tongue
- English
- Weight
- 520 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0946-7076
No coin nor oath required. For personal study only.
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