✦ LIBER ✦
Structure Changes in Ion Implanted (111)-Si Layers During Pulsed Nanosecond Annealing and Following Thermal Treatment
✍ Scribed by Gaiduk, P. I. ;Komarov, F. F. ;Solovev, V. S.
- Book ID
- 105381184
- Publisher
- John Wiley and Sons
- Year
- 1989
- Tongue
- English
- Weight
- 298 KB
- Volume
- 112
- Category
- Article
- ISSN
- 0031-8965
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