Structure and transport properties of integrated distributed electron cyclotron resonance grown micro-crystalline silicon

Effect of ion energy on structural and e

Effect of ion energy on structural and electrical properties of intrinsic microcrystalline silicon layer deposited in a matrix distributed electron cyclotron resonance plasma reactor

✍ Ram, Sanjay K. ;Kroely, Laurent ;Bulkin, Pavel ;Cabarrocas, Pere Roca i 📂 Article 📅 2010 🏛 John Wiley and Sons 🌐 English ⚖ 483 KB

## Abstract Microcrystalline silicon films were deposited in a matrix distributed electron cyclotron resonance (MDECR) plasma enhanced chemical vapor deposition (PECVD) system using pure silane, under varying substrate bias conditions. Microstructural characterization of the films shows a lower voi