Structure and electronic properties of nanoscale phases and nanofilms of metal silicides produced by ion implantation in combination with annealing

✍ Scribed by Boltaev, Kh. Kh.; Tashmukhamedova, D. A.; Umirzakov, B. E.

• Book ID: 125394197
• Publisher: Pleiades Publishing
• Year: 2014
• Tongue: English
• Weight: 637 KB
• Volume: 8
• Category: Article
• ISSN: 1027-4510
• DOI: 10.1134/S1027451014010108