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Structure analysis of cBN films prepared by DC jet plasma CVD from an Ar–N2–BF3–H2 gas system

✍ Scribed by Zhang, W.J.; Matsumoto, S.; Kurashima, K.; Bando, Y.

Book ID: 122412354
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 869 KB
Volume: 10
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(01)00424-1

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## Abstract Boron nitride (BN) films with high crystallinity and phase purity (>80 %) in the cubic phase were synthesized over large areas using fluorine chemistry and electron–cyclotron resonance (ECR) microwave plasma. Plasma‐enhanced fluorine chemistry was provided by a complex H~2~–BF~3~–N~2~–A