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Structural study of glow discharge a — Si ∶ H films

✍ Scribed by P. Danesh; S. Simov; N. Pashov; M. Kalitzova; P. Bonhomme; G. Balossier


Publisher
Springer
Year
1986
Tongue
English
Weight
375 KB
Volume
39
Category
Article
ISSN
1432-0630

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