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Structural relationship of polycrystalline cobalt silicide lines to (001) silicon substrate and their thermal stability

✍ Scribed by A. Alberti; F. La Via; C. Spinella; E. Rimini


Book ID
108411139
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
434 KB
Volume
55
Category
Article
ISSN
0167-9317

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