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Structural properties and impedance spectroscopy of excimer laser ablated Zr substituted BaTiO 3 thin films

โœ Scribed by James, A R; Prakash, Chandra; Prasad, G


Book ID
121467930
Publisher
Institute of Physics
Year
2006
Tongue
English
Weight
905 KB
Volume
39
Category
Article
ISSN
0022-3727

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Thin film capacitors with BaTiO 3 as dielectric and RuO 2 as electrode material have been prepared by rf-magnetron sputtering at temperatures up to 750 1C and under various oxygen partial pressures. They have been analyzed by complex impedance spectroscopy in the temperature range 20-200 1C. At abou