Structural-phase and stressed state of vacuum-arc-deposited nanostructural Mo-N coatings controlled by substrate bias during deposition

✍ Scribed by O. V. Sobol’; A. A. Andreev; V. A. Stolbovoi; V. E. Fil’chikov

• Book ID: 114992873
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2012
• Tongue: English
• Weight: 224 KB
• Volume: 38
• Category: Article
• ISSN: 1063-7850
• DOI: 10.1134/s1063785012020307