Structural optimization of the micro-membrane for a novel surface stress-based capacitive biosensor

✍ Scribed by Zhang, Wendong; Feng, Hui; Sang, Shengbo; Shi, Qiang; Hu, Jie; Li, Pengwei; Li, Gang

• Book ID: 119944975
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 842 KB
• Volume: 106
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2013.01.040