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Structural, morphological and magnetic characteristics of Tb-implanted GaN and AlGaN films

✍ Scribed by Gao, Xingguo; Liu, Chao; Yin, Chunhai; Tao, Dongyan; Yang, Cheng; Man, Baoyuan

Book ID
122675753
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
628 KB
Volume
178
Category
Article
ISSN
0921-5107

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## Abstract Dilute magnetic nonpolar GaN films have been fabricated by implanting Mn into unintentionally doped nonpolar __a__ ‐plane GaN films at room temperature, and a subsequent rapid thermal annealing. The X‐ray diffraction analysis shows that after rapid thermal annealing the peak of the GaN