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Structural investigation and growth of 〈n〉-type microcrystalline silicon prepared at different plasma excitation frequencies

✍ Scribed by P. Hapke; M. Luysberg; R. Carius; M. Tzolov; F. Finger; H. Wagner


Book ID
115991114
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
435 KB
Volume
198-200
Category
Article
ISSN
0022-3093

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