Structural, electrical, optical, and mechanical characterizations of decorative ZrO[sub x]N[sub y] thin films

✍ Scribed by Carvalho, P.; Vaz, F.; Rebouta, L.; Cunha, L.; Tavares, C. J.; Moura, C.; Alves, E.; Cavaleiro, A.; Goudeau, Ph.; Le Bourhis, E.; Rivière, J. P.; Pierson, J. F.; Banakh, O.

• Book ID: 120465455
• Publisher: American Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 483 KB
• Volume: 98
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1990261