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Structural, electrical, and optical properties of p-type ZnO thin films with Ag dopant

โœ Scribed by Kang, Hong Seong; Ahn, Byung Du; Kim, Jong Hoon; Kim, Gun Hee; Lim, Sung Hoon; Chang, Hyun Woo; Lee, Sang Yeol


Book ID
120373261
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
471 KB
Volume
88
Category
Article
ISSN
0003-6951

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Electrical and optical properties of und
โœ K.H. Nam; H. Kim; H.Y. Lee; D.H. Han; J.J. Lee ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 759 KB

ZnO films were grown on Si(100) and quartz substrates by inductively coupled plasma assisted chemical vapor deposition (ICP-CVD), using metal organic DEZ (diethlyzinc), and a gas mixture of Ar and O 2 . The process temperature ranged between room temperature and 400 ยฐC. ZnO films showed both p-and n