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Structural dependence of mechanical properties of Si incorporated diamond-like carbon films deposited by RF plasma-assisted chemical vapour deposition

✍ Scribed by Kwang-Ryeol Lee; Myoung-Geun Kim; Sung-Jin Cho; Kwang Yong Eun; Tae-Yeon Seong


Book ID
114086188
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
253 KB
Volume
308-309
Category
Article
ISSN
0040-6090

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