Structural and optical properties of direct current sputtered zinc aluminum oxides with a high Al concentration

Effect of deposition power on structural

Effect of deposition power on structural and electrical properties of Al-doped ZnO films using pulsed direct-current magnetron sputtering with single cylindrical target

✍ Beom-Ki Shin; Tae-Il Lee; Jyoti Prakash Kar; Min-Jung Lee; Kang-Il Park; Kyung-J 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 733 KB

The change of stoichiometric ratio caused by the increase in sputtering power in Al-doped ZnO (AZO) films was investigated, where the films were grown by pulsed dc magnetron sputtering with a cylindrical target. The properties of the films were strongly affected by the sputtering power. Lower sputte