Structural and mechanical properties of amorphous silicon carbonitride films prepared by vapor-transport chemical vapor deposition

✍ Scribed by Y. Awad; M.A. El Khakani; C. Aktik; J. Mouine; N. Camiré; M. Lessard; M. Scarlete; H.A. Al-Abadleh; R. Smirani

• Book ID: 108278575
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 760 KB
• Volume: 204
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2009.08.032