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Structural and electronic properties of dual plasma codeposited mixed-phase amorphous/nanocrystalline thin films

✍ Scribed by Adjallah, Y.; Anderson, C.; Kortshagen, U.; Kakalios, J.

Book ID
121291074
Publisher
American Institute of Physics
Year
2010
Tongue
English
Weight
887 KB
Volume
107
Category
Article
ISSN
0021-8979

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## Abstract The structural, optical, and electronic properties of nanocrystalline diamond thin films grown from a hydrogen‐rich CH~4~/H~2~ gas phase via hot filament (HF) CVD and of ultrananocrystalline diamond thin films grown from an argon‐rich sp^2^ gas phase via microwave plasma enhanced (MPE)