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Structural and electrical properties of ZnO films on freestanding thick diamond films

✍ Scribed by Sun, Jian ;Bai, YiZhen ;Sun, JingChang ;Du, GuoTong ;Jiang, Xin

Book ID
107368548
Publisher
Elsevier
Year
2008
Tongue
English
Weight
621 KB
Volume
53
Category
Article
ISSN
2095-9273

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## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of