✦ LIBER ✦
Structural and electrical properties of silicon nitride films prepared by multipolar plasma-enhanced deposition: P Boher et al,J appl Phys,63, 1988, 1464–1472
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 154 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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