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Structural analysis of DC magnetron sputtered and spin coated thin films using RBS, TEM and X-ray reflectivity methods

✍ Scribed by Umananda M. Bhatta; J. Ghatak; Mrinmay Mukhopadhyay; Raymond Conley; Chian Liu; P.V. Satyam


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
741 KB
Volume
266
Category
Article
ISSN
0168-583X

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