✦ LIBER ✦
Stripe width dependence of OED in submicron LOCOS structures: -New boundary condition for self-interstitials-
✍ Scribed by Y. Shibata; S. Hashimoto; K. Taniguchi; C. Hamaguchi
- Book ID
- 103598388
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 231 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0167-9317
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