✦ LIBER ✦
Stresses in Ru/PbZr0.4Ti0.6O3/Ru thin film stacks for integrated ferroelectric capacitors
✍ Scribed by G.A.C.M. Spierings; J.M. Breed; M.J.E. Ulenaers; P.J. van Veldhoven; P.K. Larsen
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 294 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0167-9317
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