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Stresses arising from a solid state reaction between palladium films and Si(001) investigated by in situ combined x-ray diffraction and curvature measurements

✍ Scribed by Gergaud, P.; Thomas, O.; Chenevier, B.


Book ID
121844556
Publisher
American Institute of Physics
Year
2003
Tongue
English
Weight
279 KB
Volume
94
Category
Article
ISSN
0021-8979

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