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Stress variation across arrays of lines and its influence on LOCOS oxidation

✍ Scribed by I. De Wolf; R. Rooyackers; H.E. Maes

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 437 KB
Volume: 28
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(95)00020-9

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