✦ LIBER ✦
Stress reduction of chromium thin films deposited by cluster-type sputtering system for ultra-large-size (550×650 mm) substrates
✍ Scribed by Katsunori Nakajima; ; Ken-ichi Onisawa; Ken-ichi Chahara; Tetsuroh Minemura; Mitsuhiro Kamei; Eiji Setoyama
- Book ID
- 108390472
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 308 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0042-207X
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