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Stress reduction in a-C:H coatings through the addition of nitrogen to the feed gas

✍ Scribed by Rabbani, F.; Escobar Galindo, R.; Arnoldbik, W.M.; van der Zwaag, S.; van Veen, A.; Schut, H.


Book ID
122418454
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
265 KB
Volume
13
Category
Article
ISSN
0925-9635

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